ATMI is an acknowledged leader for ion implant materials and processes in development and manufacturing. For more than a decade, ATMI has been innovating and implementing the safest and most cost-effective implant technologies and materials available.
From SDS®, the safest delivery source for handling toxic gases, to AutoClean®, the first and only in-situ cleaning system that dramatically decreases downtime and minimizes health risks, ATMI has continued to lead the way in safety and process efficiency in ion implant technology.
ATMI AutoClean® System
The First and Only In-situ Ion Implant Cleaning Process
ATMI SDS® Gas Delivery System
The Safest Technology in Gas Delivery Systems. Ever.
The Leading Pressure-Controlled Gas Delivery System