SDS® Gas Sources

The Safest and Most Efficient Technology in Gas Delivery Systems. Ever.

SDS (Safe Delivery Source) has long been the #1 choice for delivering toxic gases to the semiconductor industries. It's unmatched safety benefits and outstanding performance history is the reason why.

SDS is a groundbreaking technology designed to reduce the hazards and environmental risks associated with transporting, storing, and delivering highly toxic gases. The SDS3 employs a novel nano-porous adsorbent to contain hazardous gases at sub atmospheric pressures. SDS houses toxic gases at sub-atmospheric pressure-virtually eliminating catastrophic releases while dramatically minimizing fabrication downtime.

Since its introduction in 1993, SDS has become the standard for toxic gas delivery. Over one billion wafers have been manufactured with SDS without significant incident.

In December, 2006, the U.S. Department of Transportation declared SDS the first and only toxic gas products approved for flight transportation with a specially-designed overpak. On January 17, 2008, an SDS Arsine product made the historic, first-ever flight of a Zone A hazardous material. While largely meaningful from a safety standpoint, this also eliminates long ground and sea transport schedules, as well as occasional trucking and port-of-entry delays, for ATMI toxic gas customers.

In March of this year, Mr. Karl Olander, ATMI co-founder and SDS co-inventor, received a lifetime achievement award from the Semiconductor Environmental and Safety Association (SESHA) at its 30th annual symposium. This award is made to individuals displaying a lifetime of dedication and achievement in significantly advancing the fields of environment, health, and/or safety in the semiconductor and related high technology industries.

"We are delighted that an influential organization like as SESHA is honoring one of ATMI's co-founders and his revolutionary invention of SDS," said Doug Neugold, ATMI Chief Executive Officer. "As a direct consequence of the work of Karl and other ATMI visionaries, the semiconductor and electronics industries have consumed over 100,000 SDS cylinders. Widespread use of products such as SDS and organizations such as SESHA have helped keep the semiconductor industry at the forefront of advances in manufacturing health and safety."